Electrical tomography using atomic force microscopy and its application towards carbon nanotube-based interconnects

Schulze, AndreasAndreasSchulzeHantschel, ThomasThomasHantschelDathe, AndreAndreDatheEyben, PierrePierreEybenKe, XiaoxingXiaoxingKeVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-202012-070957-4484https://imec-publications.be/handle/20.500.12860/21481Electrical tomography using atomic force microscopy and its application towards carbon nanotube-based interconnectsJournal article