Hou, LinLinHouDerakhshandeh, JaberJaberDerakhshandehBex, PieterPieterBexCapuz, GiovanniGiovanniCapuzVan De Peer, MyriamMyriamVan De PeerWang, TengTengWangHoushmand Sharifi, ShaminShaminHoushmand SharifiDe Preter, IngeIngeDe PreterRebibis, Kenneth JuneKenneth JuneRebibisBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneDe Wolf, IngridIngridDe Wolf2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28528New approach to investigate wettability and stability of capping layers on UBMs for 3D stacking applicationsMeeting abstract