Martin Hoyas, AnaAnaMartin HoyasSchuhmacher, JorgJorgSchuhmacherWhelan, CarolineCarolineWhelanBaklanov, MikhaïlMikhaïlBaklanovCarbonell, LaureLaureCarbonellCelis, Jean-PierreJean-PierreCelisMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10864Effect of plasma treatments on a low-k dielectric polymer surfaceJournal article