Stress Relaxation in Al-Si-Cu Thin Films and Lines

Witvrouw, AnnAnnWitvrouwProost, JorisJorisProostDeweerdt, BrunoBrunoDeweerdtRoussel, PhilippePhilippeRousselMaex, KarenKarenMaex2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/463Stress Relaxation in Al-Si-Cu Thin Films and LinesOral presentation