Systematic Study on the Amorphous, C-Axis-Aligned Crystalline, and Protocrystalline Phases in In-Ga-Zn Oxide Thin-Film Transistors

Glushkova, Anastasia, VAnastasia, VGlushkovaDekkers, HaroldHaroldDekkersNag, ManojManojNagdel Agua Borniquel, Jose IgnacioJose Ignaciodel Agua BorniquelRamalingam, JothilingamJothilingamRamalingamGenoe, JanJanGenoeHeremans, PaulPaulHeremansRolin, CedricCedricRolin2022-02-212022-02-2120212637-6133WOS:000634556600027https://imec-publications.be/handle/20.500.12860/38941Systematic Study on the Amorphous, C-Axis-Aligned Crystalline, and Protocrystalline Phases in In-Ga-Zn Oxide Thin-Film TransistorsJournal article10.1021/acsaelm.0c01091WOS:000634556600027