Reference-free, in-depth characterization of nanoscaled systems with advanced grazing incidence X-ray fluorescence analysis

Hoenicke, PhilippPhilippHoenickeMueller, MatthiasMatthiasMuellerDetlefs, BlankaBlankaDetlefsFleischmann, ClaudiaClaudiaFleischmannBeckhoff, BurkhardBurkhardBeckhoff2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23945Reference-free, in-depth characterization of nanoscaled systems with advanced grazing incidence X-ray fluorescence analysisMeeting abstract