Predicting yield of photonic circuits with wafer-scale fabrication variability

Bogaerts, WimWimBogaertsXing, YufeiYufeiXingYe, YinghaoYinghaoYeKhan, Muhammad UmarMuhammad UmarKhanDong, YiaxingYiaxingDongGeessels, JorisJorisGeesselsFiers, MartinMartinFiersSpina, DomenicoDomenicoSpinaDhaene, TomTomDhaene2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32582Predicting yield of photonic circuits with wafer-scale fabrication variabilityProceedings paperhttps://ieeexplore.ieee.org/document/8853660