Integration of SrBi2Ta2O9 (SBT) based FRAM capacitors: plasma etch issues and solutions

Paraschiv, VasileVasileParaschivBoullart, WernerWernerBoullartVanhaelemeersch, SergeSergeVanhaelemeerschLisoni, JuditJuditLisoniSchwitters, MichaelMichaelSchwittersMaes, DavidDavidMaesWouters, DirkDirkWoutersCasella, P.P.CasellaZambrano, R.R.ZambranoVecchio, G.G.VecchioVan Autryve, LucLucVan Autryve2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9394Integration of SrBi2Ta2O9 (SBT) based FRAM capacitors: plasma etch issues and solutionsOral presentation