Benefits of using advanced sub-resolution features for 0.55NA brightfield imaging

Dhagat, ParulParulDhagatLeitao, SofiaSofiaLeitaoTorres, Nadia Daniela RiveraNadia Daniela RiveraTorresSchiffelers, GuidoGuidoSchiffelersRio, DavidDavidRioTabery, CyrusCyrusTabery2025-05-112025-05-112024978-1-5106-8155-20277-786XWOS:001467876500005https://imec-publications.be/handle/20.500.12860/45648Benefits of using advanced sub-resolution features for 0.55NA brightfield imagingProceedings paper10.1117/12.3035360978-1-5106-8156-9WOS:001467876500005