Morita, Y.Y.MoritaNakajima, K.K.NakajimaSuzuki, M.M.SuzukiSaitoh, Y.Y.SaitohVandervorst, WilfriedWilfriedVandervorstKimura, K.K.Kimura2021-10-192021-10-1920110168-583Xhttps://imec-publications.be/handle/20.500.12860/19454Cluster effect on projected range of 30 keV C60+ in siliconJournal article