Area-selective deposition by surface engineering for applications in nanoelectronics. From blanket to confined dimensions

Armini, SilviaSilviaArminiZyulkov, IvanIvanZyulkovHerregods, SebastiaanSebastiaanHerregodsStruyf, HerbertHerbertStruyf2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30146Area-selective deposition by surface engineering for applications in nanoelectronics. From blanket to confined dimensionsMeeting abstract