van der Linden, J. E.J. E.van der LindenVan Daele, PeterPeterVan DaeleDe Dobbelaere, PeterPeterDe DobbelaereDiemeer, M. B.M. B.Diemeer2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3026Surface mount technology based on silicon micro-optical components for beam deflectionProceedings paper