Kimura, KenjiKenjiKimuraNakajima, KaoruKaoruNakajimaZhao, MingMingZhaoNohira, HiroshiHiroshiNohiraHattori, TakeoTakeoHattoriKobata, MasaakiMasaakiKobataIkenaga, EijiEijiIkenagaKim, Jung JinJung JinKimKobayashi, KeisukuKeisukuKobayashiConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-1720080142-2421https://imec-publications.be/handle/20.500.12860/13953Combination of high-resolution RBS and angle-resolved XPS: accurate depth profiling of chemical statesJournal article