Iacovo, SerenaSerenaIacovoNagano, FuyaFuyaNaganoChannam, Venkat Sunil KumarVenkat Sunil KumarChannamWalsby, EdwardEdwardWalsbyCrook, KathKathCrookBuchanan, KeithKeithBuchananJourdain, AnneAnneJourdainVanstreels, KrisKrisVanstreelsPhommahaxay, AlainAlainPhommahaxayBeyne, EricEricBeyne2023-04-282022-09-172023-04-2820220569-5503WOS:000848765300095https://imec-publications.be/handle/20.500.12860/40441Direct Bonding Using Low Temperature SiCN DielectricsProceedings paper10.1109/ECTC51906.2022.00101978-1-6654-7943-1WOS:000848765300095