Channel Length Dependence of PBTI in High-k First RMG Gate Stack Integration Scheme

Parihar, NarendraNarendraPariharArutchelvan, GouthamGouthamArutchelvanFranco, JacopoJacopoFrancoBaudot, SylvainSylvainBaudotOpdebeeck, AnnAnnOpdebeeckDemuynck, StevenStevenDemuynckArimura, HiroakiHiroakiArimuraRagnarsson, Lars-AkeLars-AkeRagnarssonMitard, JeromeJeromeMitardDe Heyn, VincentVincentDe HeynMercha, AbdelkarimAbdelkarimMercha2022-05-062022-03-252022-05-052022-05-0620211930-8841WOS:000764115800006https://imec-publications.be/handle/20.500.12860/39514Channel Length Dependence of PBTI in High-k First RMG Gate Stack Integration SchemeProceedings paper10.1109/IIRW53245.2021.9635605978-1-6654-1794-5WOS:000764115800006