Integration of photodetectors with lasers for optical interconnects using 200 mm waferscale III-V/SOI technology

Spuesens, ThijsThijsSpuesensLiu, LiuLiuLiuVermeulen, DiedrikDiedrikVermeulenZhao, JingJingZhaoRomeo, Pedro RojoPedro RojoRomeoRegreny, RhilippeRhilippeRegrenyGrenouillet, LaurentLaurentGrenouilletFedeli, J.M.J.M.FedeliVan Thourhout, DriesDriesVan Thourhout2021-10-192021-10-192011-03https://imec-publications.be/handle/20.500.12860/19821Integration of photodetectors with lasers for optical interconnects using 200 mm waferscale III-V/SOI technologyProceedings paper