Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides

Scheerlinck, StijnStijnScheerlinckSchrauwen, JonathanJonathanSchrauwenTaillaert, DirkDirkTaillaertVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007-05https://imec-publications.be/handle/20.500.12860/12846Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguidesProceedings paper