Vega Gonzalez, VictorVictorVega GonzalezWilson, ChrisChrisWilsonBriggs, BasoeneBasoeneBriggsDecoster, StefanStefanDecosterVersluijs, JankoJankoVersluijsLesniewska, AlicjaAlicjaLesniewskaPaolillo, SaraSaraPaolilloBaert, RogierRogierBaertPuliyalil, HarinarayananHarinarayananPuliyalilBekaert, JoostJoostBekaertKesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeLorant, ChristopheChristopheLorantVarela Pedreira, OlallaOlallaVarela PedreiraTeugels, LieveLieveTeugelsHeylen, NancyNancyHeylenEl-Mekki, ZaidZaidEl-Mekkivan der Veen, MarleenMarleenvan der VeenWebers, TomasTomasWebersVats, HemantHemantVatsRynders, LucLucRyndersCupak, MiroslavMiroslavCupakLee, Jae UkJae UkLeeDrissi, YoussefYoussefDrissiHalipre, LucLucHalipreCharley, Anne-LaureAnne-LaureCharleyVerdonck, PatrickPatrickVerdonckWitters, ThomasThomasWittersVan Gompel, SanderSanderVan GompelKimura, YosukeYosukeKimuraJourdan, NicolasNicolasJourdanCiofi, IvanIvanCiofiGupta, AnshulAnshulGuptaContino, AntoninoAntoninoContinoBoccardi, GuillaumeGuillaumeBoccardiLariviere, StephaneStephaneLariviereDupas, LucLucDupasDe Wachter, BartBartDe WachterVancoille, EricEricVancoilleLazzarino, FredericFredericLazzarinoErcken, MoniqueMoniqueErckenDebacker, PeterPeterDebackerKim, Ryan Ryoung hanRyan Ryoung hanKimTrivkovic, DarkoDarkoTrivkovicCroes, KristofKristofCroesLeray, PhilippePhilippeLerayDillemans, LeanderLeanderDillemansChen, Yi-FanYi-FanChenTokei, ZsoltZsoltTokei2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34337Three-layer BEOL process integration with supervia and self-aligned-block options for the 3nm nodeProceedings paper