Lauwers, AnneAnneLauwersde Potter de ten Broeck, MurielMurielde Potter de ten BroeckChamirian, OxanaOxanaChamirianLindsay, RichardRichardLindsayDemeurisse, CarolineCarolineDemeurisseVrancken, ChristaChristaVranckenMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6528Silicides for the 100-nm node and beyond: Co-silicide, Co(Ni)-silicide and Ni-silicideJournal article