Effect of ionic strength and the electrolyte composition on the suppression of copper deposition by PEG

Atanasova, TanyaTanyaAtanasovaStrubbe, KatrienKatrienStrubbeVereecken, PhilippePhilippeVereecken2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16677Effect of ionic strength and the electrolyte composition on the suppression of copper deposition by PEGProceedings paper