Paramagnetic oxide defects in Sc2O3-passivated (100)Ge/HfO2 stacks

Stesmans, AndreAndreStesmansIacovo, SerenaSerenaIacovoCott, DaireDaireCottThean, AaronAaronTheanArimura, HiroakiHiroakiArimuraSioncke, SonjaSonjaSionckeAfanas'ev, ValeriValeriAfanas'ev2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24564Paramagnetic oxide defects in Sc2O3-passivated (100)Ge/HfO2 stacksMeeting abstract