Scanning probe tomography toward the three-dimensional characterization of confined volumes

Celano, UmbertoUmbertoCelanoVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25045Scanning probe tomography toward the three-dimensional characterization of confined volumesProceedings paperhttp://www.nanoitaly.it/nanoitaly/en/home-eng/12-abstract-ita/318-ts-v-4-3