Traub, MattMattTraubWillegems, MyriamMyriamWillegemsThirumalai, SundarSundarThirumalaiSmout, SteveSteveSmoutAsbahi, MohamedMohamedAsbahiKutrzeba Kotowska, BogumilaBogumilaKutrzeba KotowskaLenci, SilviaSilviaLenciStorace, EleonoraEleonoraStorace2024-05-062024-03-142024-05-062023978-1-5106-6003-80277-786XWOS:001170185600003https://imec-publications.be/handle/20.500.12860/43681Scalable Patterning Modules for Diffractive Optics on 300 mm SubstratesProceedings paper10.1117/12.2649739978-1-5106-6004-5WOS:001170185600003