Scholze, FrankFrankScholzeLaubis, ChristianChristianLaubisKrumrey, MichaelMichaelKrumreyTimmermans, MarinaMarinaTimmermansPollentier, IvanIvanPollentierGallagher, EmilyEmilyGallagher2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29391EUV optical characterization of alternative membrane materialsProceedings paper10.1117/12.2280553