The effects of scaling on back end of line processing

Verdonck, PatrickPatrickVerdonckWilson, ChrisChrisWilsonWen, Liang GongLiang GongWen2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24764The effects of scaling on back end of line processingProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6940080&queryText%3DThe+effects+of+scaling+on+back+end+of+line+pr