Impact of halo implantationon 0.13 μm floating body paratially depleted SOI n-MOSFETs in low termperature operation

Pavanello, M.A.M.A.PavanelloMartino, J.A.J.A.MartinoSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11005Impact of halo implantationon 0.13 μm floating body paratially depleted SOI n-MOSFETs in low termperature operationJournal article