Ultrafast RVS as an efficient method to measure oxide breakdown in the EOS and ESD time domain

Van Beek, SimonSimonVan BeekSimicic, MarkoMarkoSimicicFranco, JacopoJacopoFrancoChen, Shih-HungShih-HungChenLinten, DimitriDimitriLinten2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36115Ultrafast RVS as an efficient method to measure oxide breakdown in the EOS and ESD time domainProceedings paperhttps://ieeexplore.ieee.org/document/9241218