Baklanov, MikhaïlMikhaïlBaklanovVanhaelemeersch, SergeSergeVanhaelemeerschKim, Young-ChangYoung-ChangKimStorm, WolfgangWolfgangStormVandervorst, WilfriedWilfriedVandervorstMaex, KarenKarenMaex2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1072Protective films formed by RIE of Co and Ti silicides and ways of their removalProceedings paper