Ge- and III/V-CMP for integration of high mobility channel materials

Ong, PatrickPatrickOngWitters, LiesbethLiesbethWittersWaldron, NiamhNiamhWaldronLeunissen, PeterPeterLeunissen2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19513Ge- and III/V-CMP for integration of high mobility channel materialsProceedings paper