Ansari, IrfanIrfanAnsariDe Geest, KobeKobeDe GeestDe Witte, JasperJasperDe WitteVandekerckhove, TomTomVandekerckhoveRijckaert, H.H.RijckaertPicavet, E.E.PicavetLievens, E.E.LievensFeutmba, G. F.G. F.FeutmbaVan de Veire, T.T.Van de VeireKuyken, BartBartKuykenBeeckman, J.J.BeeckmanVan Thourhout, DriesDriesVan Thourhout2024-05-232024-03-072024-05-2320232374-0140WOS:001156890300206https://imec-publications.be/handle/20.500.12860/43636PZT micro-transfer printing for photonic MEMSProceedings paper10.1109/IPC57732.2023.10360713979-8-3503-4722-7WOS:001156890300206SILICON