Vereecke, GuyGuyVereeckeArnauts, SophiaSophiaArnautsVan Doorne, PatrickPatrickVan DoorneKenis, KarineKarineKenisOnsia, BartBartOnsiaVerstraeten, K.K.VerstraetenSchaekers, MarcMarcSchaekersVan Hoeymissen, JanJanVan HoeymissenHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5805Analysis of trace metals in thin silicon nitride films by total-reflection X-ray fluorescenceJournal article