Deep levels in high-energy proton-irradiated tin-doped n-type Czochralskii silicon

Simoen, EddyEddySimoenClaeys, CorCorClaeysNeimash, V. B.V. B.NeimashKraitchinskii, A.A.KraitchinskiiKras'ko, N.N.Kras'koPuzenko, O.O.PuzenkoBlondeel, A.A.BlondeelClauws, P.P.Clauws2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4752Deep levels in high-energy proton-irradiated tin-doped n-type Czochralskii siliconJournal article