de Marneffe, Jean-FrancoisJean-Francoisde MarneffeZhang, LipingLipingZhangWatanabe, MitsuhiroMitsuhiroWatanabeyatsuda, koichikoichiyatsudaMaekawa, KaoruKaoruMaekawaCooke, MikeMikeCookeGoodyear, AndyAndyGoodyearLeroy, FlorianeFlorianeLeroyTillocher, ThomasThomasTillocherLefaucheux, PhilippePhilippeLefaucheuxDussart, RemiRemiDussartDussarat, ChristianChristianDussaratBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26500Paths towards low-damage etching of highly porous organo-silicate low-k dielectricsOral presentation