Schulze, AndreasAndreasSchulzeLoo, RogerRogerLooMeersschaut, JohanJohanMeersschautvan Dorp, DennisDennisvan DorpGachet, DavidDavidGachetBerney, JeanJeanBerneyVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25880Recent progress in advanced in-line metrology for high-mobility semiconductorsProceedings paperhttp://www.nist.gov/pml/div683/conference/2015_presentations.cfm