Folkersma, StevenStevenFolkersmaBogdanowicz, JanuszJanuszBogdanowiczFavia, PaolaPaolaFaviaWouters, LennaertLennaertWoutersPetersen, Dirch HjorthDirch HjorthPetersenHansen, OleOleHansenHenrichsen, Henrik HartmannHenrik HartmannHenrichsenNielsen, Peter FormerPeter FormerNielsenShiv, LiorLiorShivVandervorst, WilfriedWilfriedVandervorst2023-08-092023-06-202023-06-222023-08-0920212166-2746WOS:000631877800001https://imec-publications.be/handle/20.500.12860/42019Apparent size effects on dopant activation in nanometer-wide Si finsJournal article10.1116/6.0000921WOS:000631877800001