Surface engineering by plasma and organic films to enable area selective deposition in BEOLSurface engineering by plasma and organic films to enable area selective deposition in BEOL

Armini, SilviaSilviaArminiPasquali, MattiaMattiaPasquali2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32455Surface engineering by plasma and organic films to enable area selective deposition in BEOLSurface engineering by plasma and organic films to enable area selective deposition in BEOLMeeting abstract