Makhotkin, IgorIgorMakhotkinFathabad, ZahraZahraFathabadYakunin, SergeySergeyYakuninvan de Kruijs, RobbertRobbertvan de KruijsPhilipsen, VickyVickyPhilipsenLuong, VuVuLuongBijkerk, FredFredBijkerk2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31263Advancing X-ray metrology for routine thin film analysisProceedings paper