Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technology

Ciesielski, RichardRichardCiesielskiLohr, Leonhard M.Leonhard M.LohrMertens, HansHansMertensCharley, Anne-LaureAnne-LaureCharleyde Ruyter, RudiRudide RuyterBogdanowicz, JanuszJanuszBogdanowiczHoenicke, PhilippPhilippHoenickeAbbasirad, NajmehNajmehAbbasiradSoltwisch, VictorVictorSoltwisch2024-04-112023-07-282024-04-112023978-1-5106-6099-10277-786XWOS:001022962000048https://imec-publications.be/handle/20.500.12860/42235Pushing the boundaries of EUV scatterometry: reconstruction of complex nanostructures for next-generation transistor technologyProceedings paper10.1117/12.2658501978-1-5106-6100-4WOS:001022962000048X-RAY-SCATTERINGGRATINGSSOFT