Hendrickx, EricEricHendrickxPhilipsen, VickyVickyPhilipsenHermans, JanJanHermansLorusso, GianGianLorussoVandenberghe, GeertGeertVandenbergheRonse, KurtKurtRonseKlosterman, UlrichUlrichKlostermanGao, WeiminWeiminGaoSchmoeller, ThomasThomasSchmoeller2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17248Fullfield 27nm CD control and modelingProceedings paper