Stabilization of ambient sensitive atomic layer deposited lanthanum aluminates by annealing and in-situ capping

Swerts, JohanJohanSwertsGielis, SvenSvenGielisVereecke, GuyGuyVereeckeHardy, AnAnHardyDewulf, DaanDaanDewulfAdelmann, ChristophChristophAdelmannVan Bael, MarliesMarliesVan BaelVan Elshocht, SvenSvenVan Elshocht2021-10-192021-10-1920110003-6951https://imec-publications.be/handle/20.500.12860/19855Stabilization of ambient sensitive atomic layer deposited lanthanum aluminates by annealing and in-situ cappingJournal article