Single-electron capacitance spectroscopy of individual dopants in silicon

Gasseller, M.M.GassellerDeNinno, M.M.DeNinnoLoo, RogerRogerLooHarrison, J.FJ.FHarrisonCaymax, MattyMattyCaymaxRogge, S.S.RoggeTessmer, S.H.S.H.Tessmer2021-10-192021-10-192011-101530-6984https://imec-publications.be/handle/20.500.12860/18943Single-electron capacitance spectroscopy of individual dopants in siliconJournal article10.1021/nl2025163