Line edge roughness: experimental results related to a two-parameter model

Leunissen, PeterPeterLeunissenLawrence, W.G.W.G.LawrenceErcken, MoniqueMoniqueErcken2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9195Line edge roughness: experimental results related to a two-parameter modelJournal article