Multi-crystalline Si solar cells with very fast deposited (180 nm/min) passivating hot-wire CVD silicon nitride as antireflection coating

Verlaan, VascoVascoVerlaanVan der Werf, C.H.M.C.H.M.Van der WerfHouweling, C.ZC.ZHouwelingRomijn, I.G.I.G.RomijnWeeber, A.W.A.W.WeeberDekkers, HaroldHaroldDekkersGoldbach, H.D.H.D.GoldbachSchropp, R.E.I.R.E.I.Schropp2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13180Multi-crystalline Si solar cells with very fast deposited (180 nm/min) passivating hot-wire CVD silicon nitride as antireflection coatingJournal article