The role of atomic oxygen in the decomposition of self-assembled monolayers during dielectric deposition

Brady-Boyle, AnitaAnitaBrady-BoyleO'Connor, RobertRobertO'ConnorArmini, SilviaSilviaArminiSelvaraju, VVSelvarajuBogan, JustinJustinBogan2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32609The role of atomic oxygen in the decomposition of self-assembled monolayers during dielectric depositionMeeting abstracthttps://www.iopconferences.org/IOP/media/uploaded/EVIOP/event_1193/Abstract_book_FINAL.pdf