Gallagher, EmilyEmilyGallagherVanpaemel, JohannesJohannesVanpaemelPollentier, IvanIvanPollentierZahedmanesh, HoumanHoumanZahedmaneshAdelmann, ChristophChristophAdelmannHuyghebaert, CedricCedricHuyghebaertJonckheere, RikRikJonckheereLee, Jae UkJae UkLee2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25282Properties and performance of EUVL pellicle membranesProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2467012