Photo-spectrometer based on the integration of InP/InGaAs photodetectors onto a silicon-on-insulator etched diffraction grating

Brouckaert, JoostJoostBrouckaert2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10164Photo-spectrometer based on the integration of InP/InGaAs photodetectors onto a silicon-on-insulator etched diffraction gratingProceedings paper