Impact of temperature and breakdown statistics on reliability predictions for ultra-thin oxides

Groeseneken, GuidoGuidoGroesenekenDegraeve, RobinRobinDegraeveKaczer, BenBenKaczerMaes, HermanHermanMaes2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4405Impact of temperature and breakdown statistics on reliability predictions for ultra-thin oxidesProceedings paper