Dirksen, PeterPeterDirksenBraat, JosephJosephBraatDe Bisschop, PeterPeterDe BisschopJanssen, Augustus J.E.M.Augustus J.E.M.JanssenJuffermans, CasperCasperJuffermansWilliams, AlvinaAlvinaWilliams2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6286Characterization of a projection lens using the extended Nijboer-Zernike approachProceedings paper