Timmermans, MarinaMarinaTimmermansPollentier, IvanIvanPollentierMariano, MarinaMarinaMarianoKorytov, MaximMaximKorytovLiebens, MaartenMaartenLiebensSchapmans, ElieElieSchapmansHuyghebaert, CedricCedricHuyghebaertGallagher, EmilyEmilyGallagher2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34126Free-standing carbon nanotube films for extreme ultraviolet pellicle applicationProceedings paper