Petry, JasmineJasminePetryRichard, OlivierOlivierRichardVandervorst, WilfriedWilfriedVandervorstConard, ThierryThierryConardChen, JerryJerryChenCosnier, VincentVincentCosnier2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6714Effect of N2 annealing on AlxZryOz oxideOral presentation